Substrate-bias

基本解釋

The results showed that diffusion coefficient and diffusive distance increased w ith raising of negative substrate bias.
結(jié)果表明擴(kuò)散系數(shù)和擴(kuò)散距離都隨著負(fù)襯底偏壓的增大而增大。
In the paper, the enhancing process of diamond nucleation by negative substrate bias in hot filament CVD system was analyzed.
對(duì)利用熱燈絲CVD沉積金剛石膜時(shí)負(fù)襯底偏壓增強(qiáng)金剛石的核化過(guò)程進(jìn)行了分析。
Amorphous diamond(a-D) films deposited by filtered cathodic vacuum arc(FCVA) technology with different substrate bias were investigated.
採(cǎi)用過(guò)濾隂極真空電弧技術(shù),通過(guò)施加不同襯底偏壓制備了非晶金剛石薄膜。
In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
摘要木文對(duì)熱燈絲CVD沉積金剛石膜的核化過(guò)程進(jìn)行了分析，從理論上研究了負(fù)襯底偏壓增強(qiáng)活性離子的流量。
In this paper,the nucleation process of diamond by filament CVD was analyzed,and enhanced flux of ions by negative substrate bias was investigated in theory.
本文對(duì)熱燈絲CVD沉積金剛石膜的核化過(guò)程進(jìn)行了分析，從理論上研究了負(fù)襯底偏壓增強(qiáng)活性離子的流量.