Substrate-bias

基本解釋

The results showed that diffusion coefficient and diffusive distance increased w ith raising of negative substrate bias.
結(jié)果表明擴(kuò)散系數(shù)和擴(kuò)散距離都隨著負(fù)襯底偏壓的增大而增大。
In the paper, the enhancing process of diamond nucleation by negative substrate bias in hot filament CVD system was analyzed.
對利用熱燈絲CVD沉積金剛石膜時(shí)負(fù)襯底偏壓增強(qiáng)金剛石的核化過程進(jìn)行了分析。
Amorphous diamond(a-D) films deposited by filtered cathodic vacuum arc(FCVA) technology with different substrate bias were investigated.
采用過濾陰極真空電弧技術(shù),通過施加不同襯底偏壓制備了非晶金剛石薄膜。
In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
摘要木文對熱燈絲CVD沉積金剛石膜的核化過程進(jìn)行了分析，從理論上研究了負(fù)襯底偏壓增強(qiáng)活性離子的流量。
In this paper,the nucleation process of diamond by filament CVD was analyzed,and enhanced flux of ions by negative substrate bias was investigated in theory.
本文對熱燈絲CVD沉積金剛石膜的核化過程進(jìn)行了分析，從理論上研究了負(fù)襯底偏壓增強(qiáng)活性離子的流量.