ion accelerometer
常見例句
- This accelerometer is fabricated by N type silicon wafer. To obtain high aspect ratio structure, deep reactive ion etching(DRIE) process is employed.
加速度計(jì)用普通的N型矽片制造，爲(wèi)了刻蝕高深寬比的結(jié)搆，使用了深反應(yīng)離子刻蝕（DRIE）工藝。 返回 ion accelerometer