ion accelerometer
常見(jiàn)例句
- This accelerometer is fabricated by N type silicon wafer. To obtain high aspect ratio structure, deep reactive ion etching(DRIE) process is employed.
加速度計(jì)用普通的N型硅片制造,為了刻蝕高深寬比的結(jié)構(gòu),使用了深反應(yīng)離子刻蝕(DRIE)工藝。 返回 ion accelerometer