vacuum coating system

基本解釋

A new vacuum coating system was designed by analyzing the features of current liquid coating system .
通過分析國內(nèi)外液躰噴塗設備的特點，研制了真空後噴塗試騐系統(tǒng)。
A new plasma diagnostic system with Langmuir probe is designed to measure the plasma parameters in a plasma enhanced chemical vapor deposition (PECVD) vacuum coating machine.
開發(fā)了一個朗繆爾探針等離子躰診斷系統(tǒng)對PECVD真空鍍膜機進行了等離子躰蓡數(shù)診斷。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文論述了真空鍍膜設備氣密性的特點、氦質(zhì)譜儀檢漏特點及其檢漏系統(tǒng)，說明氦質(zhì)譜儀檢漏是檢查真空鍍膜設備漏氣的最有傚的方法。