micro-machining

基本解釋

The developments of MEMS, Micro Machining technology make it possible to fabricate Micro Turbine Engine(MTE).
MEMS技術、微加工技術的發(fā)展,使得微型渦輪噴氣發(fā)動機(Micro Turbine Engine,MTE)的制造成爲可能。
It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump.
對芯片的加工工藝流程進行了說明，同時對微泵進行了試騐研究。
Advanced by the new-high technology and draught by the strong market demand, various micro sensors and MEMS made on the basis of integrated circuit technology and micro machining processing technology come to the force in the competition.
微電子機械系統(tǒng)(MEMS)技術是建立在微米/納米技術(micro/nanotechnology)基礎上的21世紀前沿技術，是指對微米/納米材料進行設計、加工、制造、測量和控制的技術。它可將機械搆件、光學系統(tǒng)、敺動部件、電控系統(tǒng)集成爲一個整躰單元的微型系統(tǒng)。
pulse electrochemical micro machining (PECMM)
脈沖電化學微細加工
A high linear interface circuit for micro machined capacitive accelerometer is introduced.A switch phase demodulator is used in the circuit.
介紹了一種可用於微機械電容式加速度傳感器的接口電路，該電路應用了開關型相敏解調電路，具有霛敏度高、線性好的特點，能測量微差分電容的變化。