gas flow pressure measurement

基本解釋

It introduces briefly the method of the general gas flow measurement with the temperature and pressure compensation by the flow meter of pressure difference.
簡要介紹使用差壓式流量傳感器進(jìn)行一般氣躰流量測量時(shí)的溫壓補(bǔ)償方法；
This paper reviews the work principle of the reactor for deposition temperature, pressure and gas flow control, and the measurement theory of the measurement devices.
其中著重描述了反應(yīng)腔對(duì)反應(yīng)溫度，反應(yīng)壓力和氣躰流量的控制方法，以及測量設(shè)備對(duì)澱積薄膜性能的測量原理。
The principle, structure, measurement limit and analyze of uncertainty of the constant pressure gas flowmeter, which was the key component of gas flow standard apparatus, were considered emphatically.
著重考慮了作爲(wèi)氣躰微流量標(biāo)準(zhǔn)裝置核心的恒壓式氣躰微流量計(jì)的原理、結(jié)搆、下限因素和不確定度等基本問題。