beam charge neutralization
常見例句
- An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本發(fā)明亦提供一分析器 磁鉄以及包括前述磁極的離子佈植機，因此實現(xiàn)了一改良一離子佈植機中 的低能量離子束空間電荷中和的方法。
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