常見例句Saburo Nonogaki, Takumi Ueno, Toshio Ito, "Microlithography Fundamentals in semiconductor devices and fabrication technology", Marcel Dekker, NY, 1998 張俊彥，鄭晃忠，"積躰電路制程及設(shè)備技術(shù)手冊"，經(jīng)濟(jì)部技術(shù)処發(fā)行，民國86年 返回 Nonogaki