micro hotplate

基本解釋

This paper reports a CMOS compatible tungsten micro-hotplate.
本文設(shè)計了一種與標(biāo)準(zhǔn)CMOS工藝兼容的鎢微熱板。
In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.
設(shè)計了一種工作在恒電壓模式的、微熱板結(jié)構(gòu)的單片集成電阻真空傳感器芯片。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
針對微熱板式微氣壓傳感器的靜態(tài)和動態(tài)性能測試，對傳感器的真空測試環(huán)境進(jìn)行了實時控制仿真。

微熱板
Ceramic micro hotplate can be used for low-power, high temperature gas sensors.
陶瓷微熱板可用于低功耗、高溫氣體傳感器中。