短語詞組短語Negative Etch -back 反回蝕Reverse etch back 反回蝕OEB Oxide Etch Back 氧化層平坦化蝕刻Process for copper etch back 發(fā)明名稱back channel etch type 背溝道刻蝕型back channel etch 道蝕刻 返回 etch back